1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Influence of plasma treatment on optical and electrical properties of a-InGaZnO films
Rent:
Rent this article for
USD
10.1116/1.4798297
/content/avs/journal/jvsta/31/3/10.1116/1.4798297
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/3/10.1116/1.4798297

Figures

Image of FIG. 1.
FIG. 1.

X-ray diffraction patterns of the IGZO films with different plasma treatments.

Image of FIG. 2.
FIG. 2.

(Color online) Optical transmission spectra for the a-IGZO films with different plasma treatments.

Image of FIG. 3.
FIG. 3.

(Color online) AFM images of the IGZO films with different plasma treatments: (a) as-deposited, (b) N2O plasma, (c) N2 plasma, (d) SiH4 plasma, and (e) NH3 plasma.

Image of FIG. 4.
FIG. 4.

(Color online) Dependence of resistivity, carrier concentration, and carrier mobility of IGZO films on plasma treatment atmosphere.

Image of FIG. 5.
FIG. 5.

(Color online) O1s XPS spectra for a-IGZO films with different plasma treatments: (a) as-deposited, (b) N2O plasma, (c) N2 plasma, (d) SiH4 plasma, and (e) NH3 plasma.

Tables

Generic image for table
TABLE I.

Surface roughness of a-IGZO films with different plasma treatments.

Generic image for table
TABLE II.

Summarization of XPS of a-IGZO films with different plasma treatments.

Loading

Article metrics loading...

/content/avs/journal/jvsta/31/3/10.1116/1.4798297
2013-03-22
2014-04-17
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of plasma treatment on optical and electrical properties of a-InGaZnO films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/3/10.1116/1.4798297
10.1116/1.4798297
SEARCH_EXPAND_ITEM