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Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method
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10.1116/1.4798309
/content/avs/journal/jvsta/31/3/10.1116/1.4798309
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/3/10.1116/1.4798309
/content/avs/journal/jvsta/31/3/10.1116/1.4798309
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/content/avs/journal/jvsta/31/3/10.1116/1.4798309
2013-03-22
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/3/10.1116/1.4798309
10.1116/1.4798309
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