1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Low-temperature CVD of η-Mn3N2−x from bis[di(tert-butyl)amido]manganese(II) and ammonia
Rent:
Rent this article for
USD
10.1116/1.4799036
/content/avs/journal/jvsta/31/3/10.1116/1.4799036
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/3/10.1116/1.4799036
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

X-ray diffractograms of films grown from Mn[N(t-Bu)2]2 and NH3 at 80 °C (bottom), 200 °C (middle), and 300 °C (top). The η-Mn3N2, Mn2N1.08, and Mn23C6 reflections are indicated.

Image of FIG. 2.
FIG. 2.

Bright-field TEM of a 50 nm-thick Mn3N2−x film grown at 100 °C with 5.0 sccm of ammonia. Insets: nanodiffraction patterns from areas 1 and 2 as indicated.

Image of FIG. 3.
FIG. 3.

Bright-field TEM of a 190 nm-thick η-Mn3N2−x film grown at 200 °C with 5.0 sccm of NH3. The inset shows a typical multigrain diffraction pattern from the film, indicating polycrystalline η-Mn3N2.

Image of FIG. 4.
FIG. 4.

(Color online) (a) 89 nm-thick film of η-Mn3N2 grown at 80 °C. (b) 73 nm-thick film of η-Mn3N2−x grown at 200 °C. (c) AFM micrographs of a 95 nm-thick η-Mn3N2−x film grown at 200 °C and 5.0 sccm ammonia flow, as deposited. The RMS roughness is 2.3 nm. (d) 185 nm-thick mixed-phase film of η-Mn3N2, ζ-phase Mn2N1.08, and cubic Mn23C6 grown at 300 °C.

Loading

Article metrics loading...

/content/avs/journal/jvsta/31/3/10.1116/1.4799036
2013-04-08
2014-04-16
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low-temperature CVD of η-Mn3N2−x from bis[di(tert-butyl)amido]manganese(II) and ammonia
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/3/10.1116/1.4799036
10.1116/1.4799036
SEARCH_EXPAND_ITEM