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Roughness evolution during the atomic layer deposition of metal oxides
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10.1116/1.4812707
/content/avs/journal/jvsta/31/6/10.1116/1.4812707
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4812707
/content/avs/journal/jvsta/31/6/10.1116/1.4812707
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/content/avs/journal/jvsta/31/6/10.1116/1.4812707
2013-07-02
2014-12-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Roughness evolution during the atomic layer deposition of metal oxides
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4812707
10.1116/1.4812707
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