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Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers
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10.1116/1.4816948
/content/avs/journal/jvsta/31/6/10.1116/1.4816948
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4816948
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) Comparison of WVTR measured for AlO barrier films grown at 100 °C by atomic layer deposition on the bare polymer and slip-coated surfaces of PET vs the number of cycles.

Image of FIG. 2.
FIG. 2.

(Color online) Ca-test (optical transmission vs time in damp heat) of AlO barrier films grown at 100 °C on the slip-coated side of PET for barrier thickness corresponding to 75, 125, and 250 ALD cycles.

Image of FIG. 3.
FIG. 3.

(Color online) Ca-test (optical transmission vs time in damp heat) of AlO barrier films grown at 100 °C on the bare polymer side of PET for barrier thickness corresponding to 75, 125, and 250 ALD cycles.

Image of FIG. 4.
FIG. 4.

(Color online) Comparison of WVTR measured for AlO barrier films grown at 100 °C by atomic layer deposition on the slip-coated surface of PET with and without pretreatment (etch).

Image of FIG. 5.
FIG. 5.

(Color online) Ca-test (optical transmission vs time in damp heat) of AlO barrier films grown at 100 °C on the () slip-coated side of PET for barrier thickness corresponding to 75, 125, and 250 ALD cycles. The lines correspond to linear fits to data at 60 °C/85% RH.

Image of FIG. 6.
FIG. 6.

(Color online) XPS C1s spectra of (a) bare PET surface, (b) slip-coated PET surface, (c) pretreated (etched) bare PET surface, and (d) pretreated (etched) slip-coated PET surface. (The spectra are relatively independent of “take-off” angle, as shown closely overlapping for 15, 45, and 90 degrees.)

Image of FIG. 7.
FIG. 7.

(Color online) Fit of Eq. (1) for failure times determined for ALD AlO barrier films (75, 125, 250 cycles) grown on the slip-coated side of PET and stored in damp heat for up to 2000 h.

Image of FIG. 8.
FIG. 8.

(Color online) Plot of failure times vs film thickness for different activation energy () using Eq. (1) and  = 100 h and  = 125 cycles.

Image of FIG. 9.
FIG. 9.

(Color online) ATR-FTIR absorbance spectra in vicinity of 3450 cm, corresponding to bulk aluminum hydroxide, for initial 15 cycles of ALD AlO films grown on bare PET.

Image of FIG. 10.
FIG. 10.

(Color online) Comparison of peak absorbance at 3450 cm, corresponding to bulk aluminum hydroxide, for initial 60 cycles of ALD AlO grown on etched and unetched surfaces of bare PET.

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/content/avs/journal/jvsta/31/6/10.1116/1.4816948
2013-08-14
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4816948
10.1116/1.4816948
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