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Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers
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10.1116/1.4816948
/content/avs/journal/jvsta/31/6/10.1116/1.4816948
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4816948
/content/avs/journal/jvsta/31/6/10.1116/1.4816948
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/content/avs/journal/jvsta/31/6/10.1116/1.4816948
2013-08-14
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4816948
10.1116/1.4816948
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