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Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb(100)
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10.1116/1.4817496
/content/avs/journal/jvsta/31/6/10.1116/1.4817496
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4817496
/content/avs/journal/jvsta/31/6/10.1116/1.4817496
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/content/avs/journal/jvsta/31/6/10.1116/1.4817496
2013-08-05
2014-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb(100)
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4817496
10.1116/1.4817496
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