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Effect of open area ratio and pattern structure on fluctuations in critical dimension and Si recessa)
a)This article is based on material presented at the 59th Symposium of the American Vacuum Society.
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10.1116/1.4817811
/content/avs/journal/jvsta/31/6/10.1116/1.4817811
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4817811
/content/avs/journal/jvsta/31/6/10.1116/1.4817811
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/content/avs/journal/jvsta/31/6/10.1116/1.4817811
2013-08-13
2014-12-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of open area ratio and pattern structure on fluctuations in critical dimension and Si recessa)
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4817811
10.1116/1.4817811
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