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Evolution of sputtered tungsten coatings at high temperature
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10.1116/1.4817813
/content/avs/journal/jvsta/31/6/10.1116/1.4817813
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4817813
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) and (c) AFM and SEM imaging, respectively, of the 1 m W sputtered film. (b) and (d) AFM and SEM imaging, respectively, of the 5 m W sputtered film, showing increased roughness of the 5 m thick layer as compared to the 1 m thick one. Preferential growth is observed in both samples.

Image of FIG. 2.
FIG. 2.

(Color online) Comparison of reflectance of bulk W (Ref. ) to the experimentally measured reflectance of (a) the 1 m sputtered W coating and (b) the 5 m sputtered W coating before and after the 1 h anneal in a tube furnace at different temperatures at a ramp rate of 2 °C/min.

Image of FIG. 3.
FIG. 3.

(Color online) (a) and (c) AFM and SEM imaging, respectively, of the 5 m W sputtered film before anneal (room temperature). (b) and (d) AFM and SEM imaging, respectively, of the 5 m W sputtered film after anneal at 900 °C for 1 h. No noticeable difference in thickness was observed after anneal despite an increase in roughness.

Image of FIG. 4.
FIG. 4.

(Color online) XRD data collected using a diffracted beam monochromator. The 1 and 5 m W films deposited on a Si (1 0 0) substrate are compared at 25 °C. The predominant peak of the Si occurring at 69.3° corresponds to the (1 0 0) peak. The predominant peak of the W occurring at 40.2° corresponds to the (1 1 0) peak, and the other significant W peak occurring at 86.9° corresponds to the higher order peak (2 2 0). The presence of only one first order peak indicates the highly textured nature of the W sample. The small peak at 36.2° 2θ can be readily identified as copper K-β peak due to the XRD source, not the W coating. No W β-phase peaks are present.

Image of FIG. 5.
FIG. 5.

(Color online) Left axis: FWHM of the 1 and 5 m W sample as a function of temperature. Right axis: microstrain of the 1 and 5 m W sample as a function of temperature. While the exact crystallite size could not be determined, the crystallite size of the 5 m sample was clearly larger resulting in a smaller FWHM of the diffraction peak.

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/content/avs/journal/jvsta/31/6/10.1116/1.4817813
2013-08-08
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evolution of sputtered tungsten coatings at high temperature
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4817813
10.1116/1.4817813
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