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Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges
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10.1116/1.4822059
/content/avs/journal/jvsta/31/6/10.1116/1.4822059
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4822059
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic diagram of the dual-frequency capacitively coupled plasma reactor including the hairpin probe and optical probe.

Image of FIG. 2.
FIG. 2.

(Color online) Axial distribution of electron, O + and O densities from the simulation. The HF power is fixed at 20 W. The LF power is fixed at 60 W. The gas pressure is fixed at 5.3 Pa.

Image of FIG. 3.
FIG. 3.

Electron density versus the HF power from the experiment (a) and simulation (b), respectively. The LF power is fixed at 60 W, and the gas pressure is fixed at 5.3 Pa.

Image of FIG. 4.
FIG. 4.

(Color online) LF, HF, and electrode voltages versus the HF power. The experimental conditions are the same as ones in Fig. 3 . Note that the voltage is the peak–peak value.

Image of FIG. 5.
FIG. 5.

(Color online) EEPFs at various HF powers. The LF power is fixed at 60 W, and the gas pressure is fixed at 5.3 Pa.

Image of FIG. 6.
FIG. 6.

Light intensity versus the HF power. The conditions are the same as ones in Fig. 3 .

Image of FIG. 7.
FIG. 7.

(Color online) Electron density versus the LF power at the HF powers of 30 and 120 W from the experiment (a) and simulation (b). The gas pressure is fixed at 5.3 Pa.

Image of FIG. 8.
FIG. 8.

(Color online) LF, HF, and electrode voltages vs the LF power at the HF power of 30 W (a) and 120 W (b). The conditions are the same as ones in Fig. 6 . Note that the voltage is the peak–peak value.

Image of FIG. 9.
FIG. 9.

(Color online) EEPFs at various LF powers at the HF power of 30 W (a) and 120 W (b). The conditions are the same as ones in Fig. 7 .

Image of FIG. 10.
FIG. 10.

(Color online) EEPF versus the secondary electron emission coefficient, γ. The HF power is fixed at 30 W. The LF power is fixed at 100 W. The gas pressure is fixed at 5.3 Pa.

Image of FIG. 11.
FIG. 11.

(Color online) Light intensity vs the LF power at the HF powers of 30 and 120 W. The conditions are the same as ones in Fig. 7 .

Image of FIG. 12.
FIG. 12.

Electron density vs the gas pressure from the simulation (a) and experiment (b). The HF power is fixed at 30 W, and the LF power is fixed at 100 W.

Image of FIG. 13.
FIG. 13.

(Color online) EEPFs at various gas pressures. The conditions are the same as ones in Fig. 12 .

Image of FIG. 14.
FIG. 14.

Light intensity vs the gas pressure. The HF power is fixed at 30 W, and the LF power is fixed at 100 W.

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/content/avs/journal/jvsta/31/6/10.1116/1.4822059
2013-09-25
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4822059
10.1116/1.4822059
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