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Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges
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10.1116/1.4822059
/content/avs/journal/jvsta/31/6/10.1116/1.4822059
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4822059
/content/avs/journal/jvsta/31/6/10.1116/1.4822059
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/content/avs/journal/jvsta/31/6/10.1116/1.4822059
2013-09-25
2014-12-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4822059
10.1116/1.4822059
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