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Space and phase resolved ion energy and angular distributions in single- and dual-frequency capacitively coupled plasmas
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10.1116/1.4822100
/content/avs/journal/jvsta/31/6/10.1116/1.4822100
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4822100
/content/avs/journal/jvsta/31/6/10.1116/1.4822100
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/content/avs/journal/jvsta/31/6/10.1116/1.4822100
2013-10-01
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Space and phase resolved ion energy and angular distributions in single- and dual-frequency capacitively coupled plasmas
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4822100
10.1116/1.4822100
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