(Color online) Intensity of the peak at m/z 73 (I73′) observed with 20 Torr of 20% TriMS/He mixture at 1300 °C (▼) and 1500 °C (●), compared with the calculated contribution to the peak intensity (I73″) from the photofragmentation of TriMS, TMS, and HMDS combined at 1300 °C (Δ), and 1500 °C (□).
(Color online) SPI TOF mass spectra (10.5 eV) of (a) 12 Torr of 1% TriMS/He and (b) 20 Torr of 20% TriMS/He in the reactor at a filament temperature of 1300 °C and a filament-on time of 15 min.
(Color online) 10.5 eV SPI TOF mass spectrum of a methane sample recorded at room temperature. The inset is a mass spectrum of 4.0 Torr of TriMS sample in the reactor at a filament temperature of 1300 °C in the mass region of 5–20 amu.
Scheme illustrating the formation of small hydrocarbons.
(Color online) Comparisons of the intensity of the peaks at (a) m/z 84, 98, and (b) m/z 16, 26, 40 vs filament-on time at 1300 °C observed with 4.0 Torr of TriMS. The inset in (b) is an enlarged plot in the low intensity region showing the peak intensities of m/z 16 and 26.
(Color online) Intensity of the peaks at m/z 88, 146, 116, 130, and 144 vs filament-on time observed with (a) 4.0 Torr of TriMS at 1300 °C, and (b) 0.12 Torr of TriMS at 1300 °C, and (c) 0.12 Torr of TriMS at 1500 °C.
Scheme illustrating the disproportionation reactions between Si-containing radicals.
(Color online) Intensity ratio of (a) I(m/z 116)/I(m/z 88), (b) I(m/z 130)/I(m/z 88), and (c) I(m/z 144)/I(m/z 88) as a function of filament-on time for the two TriMS samples of 0.12 Torr and 4.0 Torr at the filament temperatures of 1300 °C and 1500 °C.
Summary of the intensity ratios of each of the peaks at m/z 88, 146, 116, 130, and 144 to that of the peak at m/z 58 when using 0.12 and 4.0 Torr of TriMS in the hot-wire CVD reactor at filament temperatures of 1300 and 1500 °C.
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