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Effect of trimethylsilane pressure on hot-wire chemical vapor deposition chemistry using vacuum ultraviolet laser ionization mass spectrometry
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10.1116/1.4825105
/content/avs/journal/jvsta/31/6/10.1116/1.4825105
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4825105

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Intensity of the peak at m/z 73 (I73′) observed with 20 Torr of 20% TriMS/He mixture at 1300 °C (▼) and 1500  °C (●), compared with the calculated contribution to the peak intensity (I73″) from the photofragmentation of TriMS, TMS, and HMDS combined at 1300  °C (Δ), and 1500  °C (□).

Image of FIG. 2.
FIG. 2.

(Color online) SPI TOF mass spectra (10.5 eV) of (a) 12 Torr of 1% TriMS/He and (b) 20 Torr of 20% TriMS/He in the reactor at a filament temperature of 1300 °C and a filament-on time of 15 min.

Image of FIG. 3.
FIG. 3.

(Color online) 10.5 eV SPI TOF mass spectrum of a methane sample recorded at room temperature. The inset is a mass spectrum of 4.0 Torr of TriMS sample in the reactor at a filament temperature of 1300 °C in the mass region of 5–20 amu.

Image of FIG. 4.
FIG. 4.

Scheme illustrating the formation of small hydrocarbons.

Image of FIG. 5.
FIG. 5.

(Color online) Comparisons of the intensity of the peaks at (a) m/z 84, 98, and (b) m/z 16, 26, 40 vs filament-on time at 1300 °C observed with 4.0 Torr of TriMS. The inset in (b) is an enlarged plot in the low intensity region showing the peak intensities of m/z 16 and 26.

Image of FIG. 6.
FIG. 6.

(Color online) Intensity of the peaks at m/z 88, 146, 116, 130, and 144 vs filament-on time observed with (a) 4.0 Torr of TriMS at 1300 °C, and (b) 0.12 Torr of TriMS at 1300 °C, and (c) 0.12 Torr of TriMS at 1500 °C.

Image of FIG. 7.
FIG. 7.

Scheme illustrating the disproportionation reactions between Si-containing radicals.

Image of FIG. 8.
FIG. 8.

(Color online) Intensity ratio of (a) I(m/z 116)/I(m/z 88), (b) I(m/z 130)/I(m/z 88), and (c) I(m/z 144)/I(m/z 88) as a function of filament-on time for the two TriMS samples of 0.12 Torr and 4.0 Torr at the filament temperatures of 1300 °C and 1500 °C.

Tables

Generic image for table
TABLE I.

Summary of the intensity ratios of each of the peaks at m/z 88, 146, 116, 130, and 144 to that of the peak at m/z 58 when using 0.12 and 4.0 Torr of TriMS in the hot-wire CVD reactor at filament temperatures of 1300 and 1500 °C.

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/content/avs/journal/jvsta/31/6/10.1116/1.4825105
2013-10-11
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of trimethylsilane pressure on hot-wire chemical vapor deposition chemistry using vacuum ultraviolet laser ionization mass spectrometry
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4825105
10.1116/1.4825105
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