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Physical properties of epitaxial ZrN/MgO(001) layers grown by reactive magnetron sputtering
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10.1116/1.4825349
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    Affiliations:
    1 Departments of Materials Science, Physics, and the Materials Research Laboratory, University of Illinois, 104 South Goodwin, Urbana, Illinois 61801
    2 Air Force Research Laboratory, Wright Patterson Air Force Base, Dayton, Ohio 45433-7817
    3 Departments of Materials Science, Physics, and the Materials Research Laboratory, University of Illinois, 104 South Goodwin, Urbana, Illinois 61801
    4 Thin Film Physics Division, Department of Physics (IFM), Linköping University, SE-58183 Linköping, Sweden
    5 Departments of Materials Science, Physics, and the Materials Research Laboratory, University of Illinois, 104 South Goodwin, Urbana, Illinois 61801
    6 Departments of Materials Science, Physics, and the Materials Research Laboratory, University of Illinois, 104 South Goodwin, Urbana, Illinois 61801 and Thin Film Physics Division, Department of Physics (IFM), Linköping University, SE-58183 Linköping, Sweden
    a) Electronic mail: amei2@illinois.edu
    J. Vac. Sci. Technol. A 31, 061516 (2013); http://dx.doi.org/10.1116/1.4825349
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2013-10-18
2014-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Physical properties of epitaxial ZrN/MgO(001) layers grown by reactive magnetron sputtering
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/6/10.1116/1.4825349
10.1116/1.4825349
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