(Color online) Optical image showing the MSM UV and neutron detector layout.
(Color online) RF1 power dependence for hBN epilayers etched in (a) SF6 and (b) Cl2/BCl3/Ar plasma.
(Color online) AFM profile of hBN strip etched in SF6.
(Color online) SEM image of the cross-section profile of hBN strip devices etched in (a) Cl2 and (b) SF6 for comparison.
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