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Role of plasma enhanced atomic layer deposition reactor wall conditions on radical and ion substrate fluxes
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10.1116/1.4831896
/content/avs/journal/jvsta/32/1/10.1116/1.4831896
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/1/10.1116/1.4831896
/content/avs/journal/jvsta/32/1/10.1116/1.4831896
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/content/avs/journal/jvsta/32/1/10.1116/1.4831896
2013-11-18
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Role of plasma enhanced atomic layer deposition reactor wall conditions on radical and ion substrate fluxes
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/1/10.1116/1.4831896
10.1116/1.4831896
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