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Conduction processes in metal–insulator–metal diodes with Ta2O5 and Nb2O5 insulators deposited by atomic layer deposition
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10.1116/1.4843555
/content/avs/journal/jvsta/32/1/10.1116/1.4843555
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/1/10.1116/1.4843555
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Log (J) vs V plots for MIM diodes made with ZrCuAlNi bottom electrodes and Al top electrodes with (a) 10 nm of NbO and TaO insulators, and (b) 5 nm of NbO and TaO insulators. (c) Asymmetry (η) plots and (d) nonlinearity (f) plots of diodes shown in (a) and (b). Insets in (a) illustrates energy band diagrams of NbO and TaO MIM in equilibrium.

Image of FIG. 2.
FIG. 2.

(Color online) Schottky plots in (a) and (b) for the low voltage regime (V = 0.1 V to approximately 0.3 V) and Frenkel–Poole plots in (c) and (d) for the higher voltage regime (V = 0.75 V to approximately 1 V) show highly linear curves with R2 > 0.999 for both 5 nm [shown in (b) and (d)] and 10 nm [shown in (a) and (c)] NbO and TaO diodes.

Image of FIG. 3.
FIG. 3.

(Color online) (a) Log (J) vs V plots, (b) asymmetry (η) plots, and (c) nonlinearity (f) plots of 10 nm NbO diodes at different temperatures. (d) Log J vs V plots, (e) asymmetry (η) plots, and (f) nonlinearity (f) plots of 10 nm TaO diodes at different temperatures.

Image of FIG. 4.
FIG. 4.

(Color online) Plots of E vs sqrt |V| in the Frenkel–Poole dominated bias regime (V = 0.7 to 1 V) for (a) 10 nm NbO diodes, (b) 5 nm NbO diodes, (c) 10 nm TaO diodes, and (d) 5 nm TaO diodes. The trap depth, ϕ is extracted by extrapolation of the curves to zero bias. All the curves used for extrapolating trap depths are linear with R2 > 0.99.

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/content/avs/journal/jvsta/32/1/10.1116/1.4843555
2013-12-13
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Conduction processes in metal–insulator–metal diodes with Ta2O5 and Nb2O5 insulators deposited by atomic layer deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/1/10.1116/1.4843555
10.1116/1.4843555
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