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Vibration atomic layer deposition for conformal nanoparticle coating
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10.1116/1.4845735
/content/avs/journal/jvsta/32/1/10.1116/1.4845735
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/1/10.1116/1.4845735

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic diagram of vibration ALD system: (a) porous stainless steel particle-loading cylinder, (b)CF-type accommodation cylinder, (c) CF–VCR adaptor with mesh filter gasket, (d) pneumatic linear vibrator, (e) CF-flanged bellow connectors, and (f) pressure gauge.

Image of FIG. 2.
FIG. 2.

TEM images of HSAB particles coated with 70-cycle ALD AlO conducted at (a) no vibration, and vibrations at (b) 90, (c) 109, (d) 122, (e) 132, and (f) 141 Hz.

Image of FIG. 3.
FIG. 3.

Atomic concentration of aluminum measured by transmission electron microscopy–energy-dispersive x-ray spectroscopy (TEM–EDS) from HSAB particles coated with 70-cycle ALD AlO conducted at no vibration and vibrations at 90, 109, 122, 132, and 141 Hz.

Image of FIG. 4.
FIG. 4.

Particle size distribution of HSAB particles coated with 70-cycle ALD AlO conducted at no vibration and vibrations at 90, 109, 122, 132, and 141 Hz.

Image of FIG. 5.
FIG. 5.

TEM images of (a) bare HSAB powder and HSAB particles coated with ALD AlO conducted in (b) 20, (c) 40, (d) 70, and (e) 100 cycles with 141 Hz vibration.

Image of FIG. 6.
FIG. 6.

Atomic concentration of aluminum measured by TEM–EDS from bare HSAB powder and HSAB particles coated with ALD AlO in 20, 40, 70, and 100 cycles.

Tables

Generic image for table
TABLE I.

Vibration conditions applied in experiments.

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/content/avs/journal/jvsta/32/1/10.1116/1.4845735
2013-12-10
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Vibration atomic layer deposition for conformal nanoparticle coating
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/1/10.1116/1.4845735
10.1116/1.4845735
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