1887
banner image
/docserver/fulltext/jva_32-1.pdf
Volume 32, Issue 1 Front cover image - large version

Volume 32, Issue 1, January 2014

Show / Hide descriptions
FEATURED ARTICLE
  • Deposition temperature dependence of material and Si surface passivation properties of O<sub>3</sub>-based atomic layer deposited Al<sub>2</sub>O<sub>3</sub>-based films and stacks
This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
38d913362403a4a254fa758cb6527ba5 journal.issuezxybnytfddd
Scitation: Journal of Vacuum Science & Technology A - Volume 32, Issue 1
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/1
BROWSE_VIEW_TOC