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Internal oxidation and mechanical properties of Ru based alloy coatings
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10.1116/1.4826585
/content/avs/journal/jvsta/32/2/10.1116/1.4826585
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4826585

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) Schematic image of the magnetron cosputtering equipment; (b) the sample positions related to the sputter targets from the top view.

Image of FIG. 2.
FIG. 2.

XRD patterns of (a) as-deposited and (b) 30-min annealed TiRu coatings.

Image of FIG. 3.
FIG. 3.

Cross-sectional SEM images of (a) as-deposited and (b) the 600 °C, 1% O–Ar, and 30-min annealed TiRu coating.

Image of FIG. 4.
FIG. 4.

(Color online) AES depth profiles of the 600 °C, 1% O–Ar, and 30-min annealed TiRu coating.

Image of FIG. 5.
FIG. 5.

XRD patterns of (a) as-deposited and (b) 30-min annealed ZrRu coatings.

Image of FIG. 6.
FIG. 6.

(a) Surface morphology and (b) cross-sectional image of the 600 °C, 1% O–Ar, and 30-min annealed ZrRu coating.

Image of FIG. 7.
FIG. 7.

XRD patterns of (a) as-deposited and (b) 30-min annealed HfRu coatings.

Image of FIG. 8.
FIG. 8.

(Color online) (a) Cross-sectional and (b) high resolution TEM images of the 30-min annealed HfRu coating.

Image of FIG. 9.
FIG. 9.

XRD patterns of (a) as-deposited and (b) 30-min annealed VRu coatings.

Image of FIG. 10.
FIG. 10.

Cross-sectional SEM images of (a) as-deposited and (b) 30-min annealed VRu coating.

Image of FIG. 11.
FIG. 11.

(Color online) (a) Cross-sectional TEM image of the annealed VRu coating, and (b) the surface oxide, (c) the laminated zone, and (d) the recrystallized zone in (a).

Image of FIG. 12.
FIG. 12.

(Color online) AES depth profiles of the 600 °C, 1% O–Ar, and 30-min annealed VRu coating.

Image of FIG. 13.
FIG. 13.

XRD patterns of (a) as-deposited and (b) 30-min annealed CrRu coatings.

Image of FIG. 14.
FIG. 14.

Cross-sectional SEM images of (a) as-deposited and (b) 30-min annealed CrRu coating.

Image of FIG. 15.
FIG. 15.

XRD patterns of (a) as-deposited and (b) 30-min annealed MoRu coatings.

Image of FIG. 16.
FIG. 16.

XRD patterns of (a) as-deposited and (b) 30-min annealed WRu coatings.

Image of FIG. 17.
FIG. 17.

Cross-sectional SEM images of the 30-min annealed (a) MoRu and (b) WRu coatings.

Tables

Generic image for table
TABLE I.

Sputter powers for preparing M–Ru coatings and the laminate thickness.

Generic image for table
TABLE II.

Chemical compositions and mechanical properties of the as-deposited and annealed M–Ru coatings.

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/content/avs/journal/jvsta/32/2/10.1116/1.4826585
2013-10-28
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Internal oxidation and mechanical properties of Ru based alloy coatings
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4826585
10.1116/1.4826585
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