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Optimization of closed ion source for a high-sensitivity residual gas analyzer
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10.1116/1.4835635
/content/avs/journal/jvsta/32/2/10.1116/1.4835635
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4835635
/content/avs/journal/jvsta/32/2/10.1116/1.4835635
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/content/avs/journal/jvsta/32/2/10.1116/1.4835635
2013-12-04
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optimization of closed ion source for a high-sensitivity residual gas analyzer
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4835635
10.1116/1.4835635
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