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Low-cost Xe sputtering of amorphous In-Ga-Zn-O thin-film transistors by rotation magnet sputtering incorporating a Xe recycle-and-supply system
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10.1116/1.4835775
/content/avs/journal/jvsta/32/2/10.1116/1.4835775
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4835775
/content/avs/journal/jvsta/32/2/10.1116/1.4835775
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/content/avs/journal/jvsta/32/2/10.1116/1.4835775
2013-12-03
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low-cost Xe sputtering of amorphous In-Ga-Zn-O thin-film transistors by rotation magnet sputtering incorporating a Xe recycle-and-supply system
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4835775
10.1116/1.4835775
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