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Plasma damage mechanisms in low k organosilicate glass and their inhibition by Ar ion bombardment
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10.1116/1.4838935
/content/avs/journal/jvsta/32/2/10.1116/1.4838935
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4838935
/content/avs/journal/jvsta/32/2/10.1116/1.4838935
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/content/avs/journal/jvsta/32/2/10.1116/1.4838935
2013-12-09
2014-07-30
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Scitation: Plasma damage mechanisms in low k organosilicate glass and their inhibition by Ar ion bombardment
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4838935
10.1116/1.4838935
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