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Comparison of surface vacuum ultraviolet emissions with resonance level number densities. I. Argon plasmas
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10.1116/1.4859376
/content/avs/journal/jvsta/32/2/10.1116/1.4859376
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4859376

Figures

Image of FIG. 1.
FIG. 1.

(Color online) ICP source and vacuum photodiode used for VUV measurements.

Image of FIG. 2.
FIG. 2.

(Color online) Combined electrostatic and magnetic model of vacuum photodiode and simulated charged particle trajectories: 20 eV Ar+ ions orange/solid line, 5 eV electrons red/dashed line. Ions are repelled by 60 V biased anode ring. Electrons are deflected inside of the hole by the magnetic field from permanent magnets.

Image of FIG. 3.
FIG. 3.

(Color online) Coordinate system for VUV emission model.

Image of FIG. 4.
FIG. 4.

Vertical profiles of 1s resonance level densities at (a) 2.5 mTorr and (b) 15 mTorr. Points are experimental measurements, long-dashed line is uniform distribution, short-dash is cosine distribution, solid line is average of uniform and cosine distributions [i.e., Eq. (15) ].  = 0 corresponds to the bottom electrode,  = 8 cm to the midplane where the resonance density is typically measured.

Image of FIG. 5.
FIG. 5.

(Color online) VUV transitions are the only dipole-allowed decay channel for the two principal resonance levels (left). Higher resonant levels of the ( ≥ 5) and ( ≥ 3) configurations (right) can radiatively decay to either the ground state (VUV emissions with possibility of radiation trapping) or to other excited levels such as the levels of the configuration.

Image of FIG. 6.
FIG. 6.

Results as a function of pressure: (a) Ar(1s) resonance level density measurements from white-light OAS (solid squares) and from branching-fraction analysis of emissions (OES-BF, open circles); (b) measured VUV photodiode current measured at bottom electrode (points) along with VUV emission model based on measured resonance densities (line); (c) emission model values for photon flux to center of bottom electrode.

Image of FIG. 7.
FIG. 7.

(Color online) Results as a function of applied rf power at a pressure of 2.5 mTorr (red/open/dashed) and 15 mTorr (blue/solid): (a) Ar(1s) resonance level density measurements obtained from white-light OAS; (b) measured VUV photodiode current measured at bottom electrode (points) along with VUV emission model based on measured resonance densities (lines); (c) emission model values for combined 1s + 1s photon fluxes to the center of bottom electrode.

Tables

Generic image for table
TABLE I.

Lines used in OAS measurements of 1s and 1s resonance level densities.

Generic image for table
TABLE II.

Ar VUV emission lines. Possible sources of transition probabilities include the NIST atomic database (Ref. 34 ), two recent theoretical calculations (Refs. 44 and 45 ), and obtained from photoelectron spectroscopy (Ref. 46 ).

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/content/avs/journal/jvsta/32/2/10.1116/1.4859376
2014-01-08
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comparison of surface vacuum ultraviolet emissions with resonance level number densities. I. Argon plasmas
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4859376
10.1116/1.4859376
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