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Chemical bonding and defect states of LPCVD grown silicon-rich Si3N4 for quantum dot applications
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10.1116/1.4861338
/content/avs/journal/jvsta/32/2/10.1116/1.4861338
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4861338
/content/avs/journal/jvsta/32/2/10.1116/1.4861338
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/content/avs/journal/jvsta/32/2/10.1116/1.4861338
2014-01-15
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Chemical bonding and defect states of LPCVD grown silicon-rich Si3N4 for quantum dot applications
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4861338
10.1116/1.4861338
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