(Color online) (a) Measured and fitted (continuous line) XRR spectra at Cu Kα energy for different Mo films deposited with varying ion-to-atom ratios. The vertical line indicates the guideline for shifting of critical angle with increasing ion-to-atom ratios. (b) In-depth scattering length density profile obtained from best-fit XRR measurements. Z = 0 refers to film/air interface. Reprinted with permission from Yadav et al., AIP Conf. Proc. 1451, 145 (2012). Copyright 2012, AIP Publishing LLC.
(Color online) Structural parameters (relative film mass density ρf and surface roughness σ) obtained from best-fit XRR results (Fig. 1 ) for Mo films deposited at different ion-to-atom ratios.
(Color online) (a) Comparison of the surface roughness obtained by XRR and AFM for different ion-to-atom ratios. (b) Power spectral density of Mo films at various ion-to-atom ratios.
(Color online) 2D AFM scans (2 × 2 μm2) of samples grown at different ion-to-atom ratios. (a) r = 0, (b) r = 37, (c) r = 65, (d) r = 100, (e) r = 120, and (f) r = 170.
(Color online) Measured GIXRD spectra using Cu Kα energy for out-of-plane geometry of Mo thin films deposited with different ion-to-atom ratios.
(Color online) Measured Mo bcc (110) peak obtained using EDXRD for in-plane (left panel) and out-of-plane (right panel) geometry from different Mo thin films with different ion-to-atom ratios.
(Color online) Variation in grain size calculated from Mo bcc (110) peak by XRD and AFM with different ion-to-atom ratios.
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