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Influence of ion-to-atom ratio on the microstructure of evaporated molybdenum thin films grown using low energy argon ions
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10.1116/1.4862141
/content/avs/journal/jvsta/32/2/10.1116/1.4862141
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4862141
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) Measured and fitted (continuous line) XRR spectra at Cu K energy for different Mo films deposited with varying ion-to-atom ratios. The vertical line indicates the guideline for shifting of critical angle with increasing ion-to-atom ratios. (b) In-depth scattering length density profile obtained from best-fit XRR measurements. Z = 0 refers to film/air interface. Reprinted with permission from Yadav , AIP Conf. Proc. , 145 (2012). Copyright 2012, AIP Publishing LLC.

Image of FIG. 2.
FIG. 2.

(Color online) Structural parameters (relative film mass density ρ and surface roughness σ) obtained from best-fit XRR results (Fig. 1 ) for Mo films deposited at different ion-to-atom ratios.

Image of FIG. 3.
FIG. 3.

(Color online) (a) Comparison of the surface roughness obtained by XRR and AFM for different ion-to-atom ratios. (b) Power spectral density of Mo films at various ion-to-atom ratios.

Image of FIG. 4.
FIG. 4.

(Color online) 2D AFM scans (2 × 2 m2) of samples grown at different ion-to-atom ratios. (a) r = 0, (b) r = 37, (c) r = 65, (d) r = 100, (e) r = 120, and (f) r = 170.

Image of FIG. 5.
FIG. 5.

(Color online) Measured GIXRD spectra using Cu K energy for out-of-plane geometry of Mo thin films deposited with different ion-to-atom ratios.

Image of FIG. 6.
FIG. 6.

(Color online) Measured Mo bcc (110) peak obtained using EDXRD for in-plane (left panel) and out-of-plane (right panel) geometry from different Mo thin films with different ion-to-atom ratios.

Image of FIG. 7.
FIG. 7.

(Color online) Variation in grain size calculated from Mo bcc (110) peak by XRD and AFM with different ion-to-atom ratios.

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/content/avs/journal/jvsta/32/2/10.1116/1.4862141
2014-01-22
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of ion-to-atom ratio on the microstructure of evaporated molybdenum thin films grown using low energy argon ions
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4862141
10.1116/1.4862141
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