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Chemical mechanical planarization of gold
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10.1116/1.4863275
/content/avs/journal/jvsta/32/2/10.1116/1.4863275
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4863275
/content/avs/journal/jvsta/32/2/10.1116/1.4863275
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/content/avs/journal/jvsta/32/2/10.1116/1.4863275
2014-01-31
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Chemical mechanical planarization of gold
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4863275
10.1116/1.4863275
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