1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Role of the blocking capacitor in control of ion energy distributions in pulsed capacitively coupled plasmas sustained in Ar/CF4/O2
Rent:
Rent this article for
USD
10.1116/1.4863948
/content/avs/journal/jvsta/32/2/10.1116/1.4863948
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4863948
/content/avs/journal/jvsta/32/2/10.1116/1.4863948
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/avs/journal/jvsta/32/2/10.1116/1.4863948
2014-02-04
2014-07-25
Loading

Full text loading...

This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Role of the blocking capacitor in control of ion energy distributions in pulsed capacitively coupled plasmas sustained in Ar/CF4/O2
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4863948
10.1116/1.4863948
SEARCH_EXPAND_ITEM