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Effects of the cathode grain size and substrate fixture movement on the evolution of arc evaporated Cr-cathodes and Cr-N coating synthesis
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10.1116/1.4865923
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    Affiliations:
    1 Nanostructured Materials, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
    2 PLANSEE Composite Materials GmbH, DE-86983 Lechbruck am See, Germany
    3 Ionbond Sweden AB, Box 1161, SE-58111 Linköping, Sweden
    4 Nanostructured Materials, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden and SECO Tools AB, SE-737 82 Fagersta, Sweden
    5 Sandvik Coromant, 126 80 Stockholm, Sweden
    6 Nanostructured Materials, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
    a) Electronic mail: zhu@ifm.liu.se
    J. Vac. Sci. Technol. A 32, 021515 (2014); http://dx.doi.org/10.1116/1.4865923
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/content/avs/journal/jvsta/32/2/10.1116/1.4865923
2014-02-26
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of the cathode grain size and substrate fixture movement on the evolution of arc evaporated Cr-cathodes and Cr-N coating synthesis
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/2/10.1116/1.4865923
10.1116/1.4865923
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