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Effect of water uptake on the fracture behavior of low-k organosilicate glass
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10.1116/1.4871680
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    Affiliations:
    1 Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706
    2 Forest Biopolymer Science and Engineering, USDA Forest Service Forest Products Laboratory, Madison, Wisconsin 53726
    3 Applied Materials, Sunnyvale, California 94085
    4 Department of Electrical Engineering, Stanford University, Stanford, California 94305
    5 Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706
    a) Electronic mail: shohet@engr.wisc.edu
    J. Vac. Sci. Technol. A 32, 031512 (2014); http://dx.doi.org/10.1116/1.4871680
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/content/avs/journal/jvsta/32/3/10.1116/1.4871680
2014-04-18
2014-08-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of water uptake on the fracture behavior of low-k organosilicate glass
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/3/10.1116/1.4871680
10.1116/1.4871680
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