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Characterization of the cleaning process on a transferred graphene
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10.1116/1.4886735
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    Affiliations:
    1 Institute of Physics, Academia Sinica, Taipei 115, Taiwan; Department of Engineering and System Science, National Tsing Hua University, Hsinchu 300, Taiwan; and Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica, Taipei 115, Taiwan
    2 Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei 106, Taiwan and Institute of Polymer Science and Engineering, National Taiwan University, Taipei 106, Taiwan
    3 Department of Optics and Photonics, National Central University, Chung-Li 320, Taiwan
    4 Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei 106, Taiwan
    5 Research Center of Applied Science, Academia Sinica, Taipei 115, Taiwan
    6 Department of Engineering and System Science, National Tsing Hua University, Hsinchu 300, Taiwan
    7 Institute of Physics, Academia Sinica, Taipei 115, Taiwan and Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica, Taipei 115, Taiwan
    a) Electronic mail: jasonc@phys.sinica.edu.tw
    J. Vac. Sci. Technol. A 32, 050601 (2014); http://dx.doi.org/10.1116/1.4886735
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2014-07-03
2014-07-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of the cleaning process on a transferred graphene
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/32/5/10.1116/1.4886735
10.1116/1.4886735
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