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/content/avs/journal/jvsta/34/2/10.1116/1.4941409
2016-02-05
2016-12-04

Abstract

AlCrcompositecathodes with Al contents of  = 0.75, 0.5, and 0.25 were exposed to cathodic arc plasmas in Ar, N, and O atmospheres and their erosion behavior was studied. Cross-sectional analysis of the elemental distribution of the near-surface zone in the cathodes by scanning electron microscopy revealed the formation of a modified layer for all cathodes and atmospheres. Due to intermixing of Al and Cr in the heat-affected zone, intermetallic Al-Cr phases formed as evidenced by x-ray diffraction analysis. Cathode poisoning effects in the reactive N and O atmospheres were nonuniform as a result of the applied magnetic field configuration. With the exception of oxide islands on Al-rich cathodes, reactive layers were absent in the circular erosion zone, while nitrides and oxides formed in the less eroded center region of the cathodes.

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