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Secondary ion mass spectrometry profiling of shallow, implanted layers using quadrupole and magnetic sector instruments
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10.1116/1.574152
/content/avs/journal/jvsta/5/3/10.1116/1.574152
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/5/3/10.1116/1.574152
/content/avs/journal/jvsta/5/3/10.1116/1.574152
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/content/avs/journal/jvsta/5/3/10.1116/1.574152
1987-05-01
2014-09-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Secondary ion mass spectrometry profiling of shallow, implanted layers using quadrupole and magnetic sector instruments
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/5/3/10.1116/1.574152
10.1116/1.574152
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