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On the temperature dependence of the deposition rate of amorphous, hydrogenated carbon films
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10.1116/1.576403
/content/avs/journal/jvsta/8/1/10.1116/1.576403
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/8/1/10.1116/1.576403
/content/avs/journal/jvsta/8/1/10.1116/1.576403
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/content/avs/journal/jvsta/8/1/10.1116/1.576403
1990-01-01
2014-07-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: On the temperature dependence of the deposition rate of amorphous, hydrogenated carbon films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/8/1/10.1116/1.576403
10.1116/1.576403
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