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A fully automated hot‐wall multiplasma‐monochamber reactor for thin film deposition
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10.1116/1.577318
/content/avs/journal/jvsta/9/4/10.1116/1.577318
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/9/4/10.1116/1.577318
/content/avs/journal/jvsta/9/4/10.1116/1.577318
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/content/avs/journal/jvsta/9/4/10.1116/1.577318
1991-07-01
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A fully automated hot‐wall multiplasma‐monochamber reactor for thin film deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/9/4/10.1116/1.577318
10.1116/1.577318
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