Skip to main content
banner image
image of Journal of Vacuum Science & Technology B
ISSN: 2166-2746
E-ISSN: 2166-2754

Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.

To re-register for Table of Content Alerts, please click here.

Editor's Picks

  • High temperature MBE of graphene on sapphire and hexagonal boron nitride flakes on sapphire
  • SiyGe1−x−ySnx films grown on Si using a cold-wall ultrahigh-vacuum chemical vapor deposition system
  • Carbon nanotube field effect transistor aptasensors for estrogen detection in liquids
  • Charge control in N-polar InAlN high-electron-mobility transistors grown by plasma-assisted molecular beam epitaxy
  • Fabrication of artificial graphene in a GaAs quantum heterostructure

Latest Articles

Cover image Placeholder
ISSN: 2166-2746
E-ISSN: 2166-2754

Agency: AVS: Science & Technology of Materials, Interfaces, and Processing

Access Key

  • FFree Content
  • OAOpen Access Content
  • SSubscribed Content
  • TFree Trial Content
02c42c7313f5e0851ceededdf19fdb72 journal.journalzxybnytfddd