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ISSN: 2166-2746
E-ISSN: 2166-2754

Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.

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Editor's Picks

  • Large-scale fabrication of a simple cubic metal-oxide photonic crystal for light-trapping applications
  • Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects
  • Fabrication of long-range surface plasmon hydrogen sensors on Cytop membranes integrating grating couplers
  • Defect-mediated transport and electronic irradiation effect in individual domains of CVD-grown monolayer MoS<span class=2" title="Defect-mediated transport and electronic irradiation effect in individual domains of CVD-grown monolayer MoS" />
  • Sub-20 nm silicon patterning and metal lift-off using thermal scanning probe lithography

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ISSN: 2166-2746
E-ISSN: 2166-2754

Agency: AVS: Science & Technology of Materials, Interfaces, and Processing

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Scitation: Journal of Vacuum Science & Technology B: Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
http://aip.metastore.ingenta.com/content/avs/journal/jvstb
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