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ISSN: 2166-2746
E-ISSN: 2166-2754

Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.

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Editor's Picks

  • Revealing optically induced magnetization in SrTiO<sub>3</sub> using optically coupled SQUID magnetometry and magnetic circular dichroism
  • Extrinsic origins of electronic disorder in 2D organic crystals
  • Selectivity of metal oxide atomic layer deposition on hydrogen terminated and oxidized Si(001)-(2×1) surface
  • Fabrication of monodisperse particles by nanoimprinting using anodic porous alumina molds
  • Microstructure of Ti/Al/Ni/Au ohmic contacts for N-polar GaN/AlGaN high electron mobility transistor devices

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ISSN: 2166-2746
E-ISSN: 2166-2754

Agency: AVS: Science & Technology of Materials, Interfaces, and Processing

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Scitation: Journal of Vacuum Science & Technology B