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ISSN: 2166-2746
E-ISSN: 2166-2754

Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.

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ISSN: 2166-2746
E-ISSN: 2166-2754

Agency: AVS: Science & Technology of Materials, Interfaces, and Processing

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Scitation: Journal of Vacuum Science & Technology B: Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena