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ISSN: 2166-2746
E-ISSN: 2166-2754

Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.

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Editor's Picks

  • Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity
  • Thickness characterization of atomically thin WSe2 on epitaxial graphene by low-energy electron reflectivity oscillations
  • Magnetoreflection spectroscopy of monolayer transition-metal dichalcogenide semiconductors in pulsed magnetic fields