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Multilayer resist technique for submicron optical lithography
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10.1116/1.582751
/content/avs/journal/jvstb/1/4/10.1116/1.582751
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/1/4/10.1116/1.582751
/content/avs/journal/jvstb/1/4/10.1116/1.582751
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/content/avs/journal/jvstb/1/4/10.1116/1.582751
1983-10-01
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Multilayer resist technique for submicron optical lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/1/4/10.1116/1.582751
10.1116/1.582751
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