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Reactive ion etching for microelectrical mechanical system fabrication
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10.1116/1.588007
/content/avs/journal/jvstb/13/6/10.1116/1.588007
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/13/6/10.1116/1.588007
/content/avs/journal/jvstb/13/6/10.1116/1.588007
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/content/avs/journal/jvstb/13/6/10.1116/1.588007
1995-11-01
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reactive ion etching for microelectrical mechanical system fabrication
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/13/6/10.1116/1.588007
10.1116/1.588007
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