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H2O enhanced focused ion beam micromachining
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10.1116/1.588395
/content/avs/journal/jvstb/13/6/10.1116/1.588395
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/13/6/10.1116/1.588395
/content/avs/journal/jvstb/13/6/10.1116/1.588395
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/content/avs/journal/jvstb/13/6/10.1116/1.588395
1995-11-01
2014-07-11
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: H2O enhanced focused ion beam micromachining
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/13/6/10.1116/1.588395
10.1116/1.588395
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