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Large‐area achromatic interferometric lithography for 100 nm period gratings and grids
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10.1116/1.588613
/content/avs/journal/jvstb/14/6/10.1116/1.588613
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/14/6/10.1116/1.588613
/content/avs/journal/jvstb/14/6/10.1116/1.588613
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/content/avs/journal/jvstb/14/6/10.1116/1.588613
1996-11-01
2014-08-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large‐area achromatic interferometric lithography for 100 nm period gratings and grids
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/14/6/10.1116/1.588613
10.1116/1.588613
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