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Novel effects in inorganic photoresists and their application in micro-optics
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10.1116/1.589492
/content/avs/journal/jvstb/15/4/10.1116/1.589492
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/15/4/10.1116/1.589492
/content/avs/journal/jvstb/15/4/10.1116/1.589492
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/content/avs/journal/jvstb/15/4/10.1116/1.589492
1997-07-01
2015-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Novel effects in inorganic As50Se50 photoresists and their application in micro-optics
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/15/4/10.1116/1.589492
10.1116/1.589492
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