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Novel lithography and signal processing with water vapor ions
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10.1116/1.589540
/content/avs/journal/jvstb/15/4/10.1116/1.589540
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/15/4/10.1116/1.589540
/content/avs/journal/jvstb/15/4/10.1116/1.589540
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/content/avs/journal/jvstb/15/4/10.1116/1.589540
1997-07-01
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Novel lithography and signal processing with water vapor ions
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/15/4/10.1116/1.589540
10.1116/1.589540
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