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Control in sub-100 nm lithography in SAL-601
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10.1116/1.589639
/content/avs/journal/jvstb/15/6/10.1116/1.589639
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/15/6/10.1116/1.589639
/content/avs/journal/jvstb/15/6/10.1116/1.589639
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/content/avs/journal/jvstb/15/6/10.1116/1.589639
1997-11-01
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Control in sub-100 nm lithography in SAL-601
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/15/6/10.1116/1.589639
10.1116/1.589639
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