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Radial uniformity of an external-coil ionized physical vapor deposition source
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10.1116/1.589856
/content/avs/journal/jvstb/16/2/10.1116/1.589856
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/2/10.1116/1.589856
/content/avs/journal/jvstb/16/2/10.1116/1.589856
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/content/avs/journal/jvstb/16/2/10.1116/1.589856
1998-03-01
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Radial uniformity of an external-coil ionized physical vapor deposition source
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/2/10.1116/1.589856
10.1116/1.589856
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