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Selective etching of AlGaAs/GaAs structures using the solutions of citric acid/ and de-ionized /buffered oxide etch
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10.1116/1.589862
/content/avs/journal/jvstb/16/2/10.1116/1.589862
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/2/10.1116/1.589862
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/content/avs/journal/jvstb/16/2/10.1116/1.589862
1998-03-01
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Selective etching of AlGaAs/GaAs structures using the solutions of citric acid/H2O2 and de-ionized H2O/buffered oxide etch
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/2/10.1116/1.589862
10.1116/1.589862
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