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Polycrystalline silicon field emitter arrays by silicidation-sharpening technique at low temperature
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10.1116/1.589902
/content/avs/journal/jvstb/16/2/10.1116/1.589902
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/2/10.1116/1.589902
/content/avs/journal/jvstb/16/2/10.1116/1.589902
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/content/avs/journal/jvstb/16/2/10.1116/1.589902
1998-03-01
2015-04-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Polycrystalline silicon field emitter arrays by silicidation-sharpening technique at low temperature
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/2/10.1116/1.589902
10.1116/1.589902
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