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Minority-carrier recombination lifetimes of the frontside and backside of Si wafers subjected to plasma processing
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10.1116/1.590063
/content/avs/journal/jvstb/16/3/10.1116/1.590063
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/3/10.1116/1.590063
/content/avs/journal/jvstb/16/3/10.1116/1.590063
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/content/avs/journal/jvstb/16/3/10.1116/1.590063
1998-05-01
2015-03-05
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Minority-carrier recombination lifetimes of the frontside and backside of Si wafers subjected to plasma processing
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/3/10.1116/1.590063
10.1116/1.590063
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