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Structural, optical, and electrical properties of nanocrystalline silicon films deposited by hydrogen plasma sputtering
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10.1116/1.590097
/content/avs/journal/jvstb/16/4/10.1116/1.590097
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/4/10.1116/1.590097
/content/avs/journal/jvstb/16/4/10.1116/1.590097
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/content/avs/journal/jvstb/16/4/10.1116/1.590097
1998-07-01
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural, optical, and electrical properties of nanocrystalline silicon films deposited by hydrogen plasma sputtering
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/4/10.1116/1.590097
10.1116/1.590097
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