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Deep, vertical etching of flame hydrolysis deposited hi-silica glass films for optoelectronic and bioelectronic applications
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10.1116/1.590098
/content/avs/journal/jvstb/16/4/10.1116/1.590098
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/4/10.1116/1.590098
/content/avs/journal/jvstb/16/4/10.1116/1.590098
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/content/avs/journal/jvstb/16/4/10.1116/1.590098
1998-07-01
2014-07-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Deep, vertical etching of flame hydrolysis deposited hi-silica glass films for optoelectronic and bioelectronic applications
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/4/10.1116/1.590098
10.1116/1.590098
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