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Sidewall slope control of chemically assisted ion-beam etched structures in InP-based materials
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10.1116/1.590099
/content/avs/journal/jvstb/16/4/10.1116/1.590099
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/4/10.1116/1.590099
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/content/avs/journal/jvstb/16/4/10.1116/1.590099
1998-07-01
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Sidewall slope control of chemically assisted ion-beam etched structures in InP-based materials
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/4/10.1116/1.590099
10.1116/1.590099
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