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Evaluation of trifluoroiodomethane as etchant for global warming reduction
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10.1116/1.590303
/content/avs/journal/jvstb/16/4/10.1116/1.590303
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/4/10.1116/1.590303
/content/avs/journal/jvstb/16/4/10.1116/1.590303
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/content/avs/journal/jvstb/16/4/10.1116/1.590303
1998-07-01
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evaluation of trifluoroiodomethane as SiO2 etchant for global warming reduction
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/4/10.1116/1.590303
10.1116/1.590303
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