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Parallel and hierarchical postprocessing for variable spot electron beam lithography
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10.1116/1.590363
/content/avs/journal/jvstb/16/6/10.1116/1.590363
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/6/10.1116/1.590363
/content/avs/journal/jvstb/16/6/10.1116/1.590363
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/content/avs/journal/jvstb/16/6/10.1116/1.590363
1998-11-01
2014-10-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Parallel and hierarchical postprocessing for variable spot electron beam lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/16/6/10.1116/1.590363
10.1116/1.590363
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